Introduction, Why miniaturization?, Microsystems versus MEMS, Why micro fabrication?, smart materials, structures and systems, integrated Microsystems, applications of smart materials and Microsystems.
Micro sensors, actuators, systems and smart materials: Silicon capacitive accelerometer, piezoresistive pressure sensor, conductometric gas sensor, anelectrostatic combo-drive, a magnetic microrelay, portable blood analyzer, piezoelectric inkjet print head, micromirror array for video projection, smart materials and systems.
Micromachining technologies: silicon as a material for micro machining, thin film deposition, lithography, etching, silicon micromachining, specialized materials for Microsystems, advanced processes for micro fabrication.
Modeling of solids in Microsystems: Bar, beam, energy methods for elastic bodies, heterogeneous layered beams, bimorph effect, residual stress and stress gradients, poisson effect and the anticlastic curvature of beams, torsion of beams and shear stresses, dealing with large displacements, In-plane stresses, Modelling of coupled electromechanical systems: electrostatics, Coupled
Electro-mechanics: statics, stability and pull-in phenomenon, dynamics. Squeezed film effects in electromechanics.
Integration of micro and smart systems: integration of Microsystems and microelectronics, microsystems packaging, case studies of integrated Microsystems, case study of a smart-structure in vibration control. Scaling effects in Microsystems: scaling in: mechanical domain, electrostatic domain, magnetic domain, diffusion, effects in the optical domain, biochemical phenomena.